HM5000 Series MASS FLOWMETER and CONTROLLER

TOKYO KEISO CO., LTD.

3

TG-F2324-E00

EXAMPLE OF MODEL SELECTION

Flow range indicates the flow rate on the basis of N2 gas.

When measuring other gases than N2, the flow rate converted to N2 gas shall be obtained by the below-mentioned Conversion Factor (CF),

and then confirm if it is in the desired model.

The flow rate converted to N2 gas can be obtained by the following formula.

X1

X2

Xn

CF1

CF2

CFn

1

+

+......+

X1 : Density of Component 1 (VOL%/100)

X2 : Density of Component 2 (VOL%/100)

Xn: Density of Component n (VOL%/100)

CF1 : CF of Component 1

CF2 : CF of Component 2

CFn : CF of Component n

Flow rate of gas to be used

CF of mixed gas =

In case of single component:

Flow rate converted to N2 gas =

CF

Flow rate of mixed gas

Flow rate converted to N2 gas =

In case of mixed gas:

CF of mixed gas shall be obtained, and then the conversion to N2 gas shall be made as well as the single component.

CF of mixed gas

Gas

Chemical

Formula

Argon

Conversion Factor (CF)

*Other gases besides the above mentioned ones can be measured, too. Contact Tokyo Keiso if any.

Ar

Air

B2H6

CH4

C2H6

C3H8

C4H10

C2H2

Air

Diborane

Methane

Ethane

Propane

Butane

Acetylene

Conversion

Factor (CF)

1.40

1.00

0.46

0.74

0.51

0.34

0.32

0.66

Gas

Chemical

Formula

Ethylene

C2H4

C3H6

CO2

CO

H2

He

NH3

Ne

Propylene

Carbon-dioxide gas

Carbon monoxide

Hydrogen

Helium

Anmonia

Neon

Conversion

Factor (CF)

0.64

0.44

0.74

1.00

1.00

1.40

0.78

1.39

Gas

Chemical

Formula

Nitrogen monoxide NO

NO2

N2O

N2

O2

PH3

SiH4

SO2

Nitrogen dioxide

Nitrogen oxide

Nitrogen

Oxygen

Phosphine

Silane

Sulfur dioxide

Conversion

Factor (CF)

0.99

0.75

0.74

1.00

0.99

0.78

0.66

0.70

E

xample

Fluid

: CH4

Flow rate

: 5L/min(nor)

Pressure

: 0.5MPa

Temperature

: 20°C

Fitting

: 1/4" SWL

Flowmeter alone : Desired accuracy :

±1% F.S.

Flow rate conversed to N2 gas =

5L/min (nor)

0.74 (CF)

= 6.76L/min (nor)

Model covering this flow rate is

HM5111B13ZS.