HM5000 Series MASS FLOWMETER and CONTROLLER

2

TOKYO KEISO CO., LTD.

TG-F2324-E00

SPECIFICATIONS

Model

(Mass Flowmeter)

Model

(Mass Flow Controller)

Scale range

(N2 conversion)

HM5122B

HM5172B (NC)

HM5182B (NO)

30/50/100/200

L/min(nor)

HM5123B

HM5173B (NC)

400L/min(nor)

HM5111B

HM5141B (NC)

HM5151B (NO)

HM5112B

HM5142B (NC)

HM5152B (NO)

30/50/100/200

L/min(nor)

HM5113B

HM5143B (NC)

400L/min(nor)

5/10/20/30/50/100/

200/300/500/1000

mL/min(nor)

2/3/5/10/20

L/min(nor)

Classification

Wide use type

High performance type

Classification

Mass Flowmeter

Mass Flow Controller

Accuracy

Linearity

Reproducibility

Operating differential

pressure

Operating temperature

Set signal

Output signal

Fitting

Mass

Power consumption

Slow start circuit

Output voltage 0~5VDC

Output voltage 1~5VDC(Option)

0.1~5VDC

Pressure loss

4.9kPa

: 5mL/min (nor)~20L/min (nor)

9.8kPa

: 30L/min (nor)~200L/min (nor)

15.7kPa : 400L/min (nor)

34.3~274.4kPa

: 5mL/min (nor)~5L/min (nor)

68.6~274.4kPa

: 10L/min (nor)~200L/min (nor)

107.8~274.4kPa

: 400L/min (nor)

Within 1W

Within 3W

: 5mL/min (nor)~20L/min (nor)

Within 5W

: 30L/min (nor)~200L/min (nor)

Within 5W

: 400L/min (nor)

Built-in (Option)

Only NC is applied.

Cable

2m with connector (Std.), 3m, 5m (Option)

2 to 100% of Span

Control range

600g (Except Power supply and Cable)

750g (Except Power supply and Cable)

: 5mL/min (nor)~20L/min (nor)

: 5mL/min (nor)~20L/min (nor)

1.6kg (Except Power supply and Cable)

3kg (Except Power supply and Cable)

: 30L/min (nor)~200L/min (nor)

: 30L/min (nor)~200L/min (nor)

2kg (Except Power supply and Cable)

3.7kg (Except Power supply and Cable)

: 400L/min (nor)

: 400L/min (nor)

1/4" Swagelok (Option VCR, VOC) : 5mL/min (nor)~20L/min (nor)

3/8" Swagelok (Option VCR, VOC) : 30L/min (nor)~100L/min (nor)

1/2" Swagelok (Option VCR, VOC) : 200L/min (nor)~400L/min (nor)

SUS316, Teflon, FKM

SUS316, FKM

Contact gas material

Free (

±0.5% of Span)

Position of installation

1x10-9

3/s (He) or below

Leak standard

5~45oC (Gas temperature is same as operating temperature)

1470kPa

Test pressure

970kPa

Max. operating pressure

Within 3 seconds up to

±2% of set value

Within 3 seconds (98% of Span)

Response

Wide use type :

±0.4% F.S.

High performance type :

±0.2% F.S.

Wide use type :

±1% F.S.

High performance type :

±0.5% F.S.

Wide use type :

±2% F.S. (HM5123B, HM5173B ±4% F.S.)

High performance type :

±1% F.S. (HM5113B, HM5143B ±2% F.S.)

The calibration criterion is 0

oC and 1 atm. (Calibration can be made in other temperatures.)

The standard flow range is for N2 gas. The range may vary depending on the kind of gas.

NC and NO stands for “Normal close type” and “Normal open type” respectively.

500L/min(nor) is possible in flow range. (N2 Conversion)

Chloroprene rubber is available for the sealing material.