OUTLINE

HM5000 series is Thermal Mass Flowmeter and Controller, which

measure various kinds of gas.

The flow rate of gas from 5mL/min(nor) to 400L/min(nor) can be

measured and controlled without being influenced by the change in

temperature and pressure.

There are two types available: Mass Flowmeter to measure flow

rate and Mass Flow Controller with control valve built in, and also

available in high performance and wide use types. Selection can be

made depending upon the applications.

FEATURES

❏ Flow rate measurment in wide range

Available for wide range from 0 to 5mL/min(nor) to 0 to 400 L/min (nor).

❏ High accuracy

±1%F.S. (High performance type)

❏ Miniaturization and improvement of reliability

❏ The following functions possible to add optionally.

Slow start function (Normal close type)

Output signal : 1 to 5VDC

APPLICATIONS

❏ Utility gas supply lines in industries

❏ Various instruments for analysis

❏ Semiconductor gas supply lines

❏ Gas constant flow control and mixture control

❏ Embedded devices

MODEL CODE

H M 5 1 4 1 B 0 6 A S

Model

Name of Gas

Symbol

Name of Gas

A

N2

B

Air

C

O2

D

H2

E

He

F

Ar

Z

Others

Joint

Symbol

Fitting

Remarks

S

Swagelok

Standard

R

VCR

Option

O

VCO

Option

Z

Others

Option

Flow range

01

5mL/min (nor)

11

2L/min (nor)

02

10mL/min (nor)

12

3L/min (nor)

03

20mL/min (nor)

13

5L/min (nor)

04

30mL/min (nor)

14

10L/min (nor)

05

50mL/min (nor)

15

20L/min (nor)

06

100mL/min (nor)

16

30L/min (nor)

07

200mL/min (nor)

17

50L/min (nor)

08

300mL/min (nor)

18

100L/min (nor)

09

500mL/min (nor)

19

200L/min (nor)

10

1000mL/min (nor)

20

400L/min (nor)

99

Code

Flow span

Code

Flow span

Special

● Consult factory for special specification.

● If required optionally, append the contents above “MODEL CODE”.

High accuracy & High Performance

HM5000 Series

MASS FLOWMETER / CONTROLLER

TG-F2324-E00

1st edition Dec 2022 K