ASF1400 datasheet(3/9 Pages) ETC2

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ASF1400 Bidirectional Mass Flow Meter

1 Mass Flow Sensor Performance

Table 1: Overview of ASF1400 Gas Sensor Performance1

Parameter

Condition

Minimum

Typical

Maximu

Units

Flow Sensor

direct measurement

-400

400

sccm( )2

using proposed bypass tube(2 )3

-100

100

liter/min( )4

Dynamic Range

customized bypass tube

unlimited

Resolution

400 sccm flow

0.09

sccm

< 10 sccm flow

0.01

sccm

Lowest Detectable

Flow

< 10 sccm flow

0.015(4)

sccm

Pressure Drop

400 sccm, pabs. = 1 bar

120

Pa( )5

Repeatability

0.0025 % FS ( )6

0.025 % m.v.

0…5 % of full scale

0.05 % FS ( )7

Accuracy

23 C

5…100 % of full scale

1 % m.v. ( )7

Offset

23°C

< 0.005

< 0.02

% FS

Overpressure

Resistance

bar

( )

depends on resolution setting

142

1280

Response Time ( )9

(see Section 3, Table 2)

Operating

Temperature

°C

Zero

< 0.005

% FS / °C

Ambient

Temperature

Coefficient

Span

< 0.08

% measured value /

°C

Position Sensitivity

p =1 bar, small nitrogen flow

±0.008

% FS

abs

Temperature

Sensor

Measures temperature inside the sensor, but not of the surrounding air(10 )

Dynamic Range

°C

Resolution

0.1

°C

Accuracy

°C

All data apply for calibration conditions (20°C, 1013 mbar) unless otherwise noted.

1 sccm = 1 cm3/min at 0°C and 1013mbar pressure (1sccm = 0.001 norm liter)

using bypass tube included in Sensirion’s mass flow meter evaluation kit EK-F1

1 liter/min = 1000 sccm

1 bar = 100 000 Pa = 0.9869 atm = 401.9 inch H2O = 14.5 psi

Error = % of full scale (FS) or % of measured value, whichever is bigger.

Better calibration available for high volume OEM on request. Allow the Sensor to warm up for best results.

For higher overpressure resistance versions please check the EM1 product page.

For faster response times please check out the ASF1430 high speed mass flow meter data sheet

The sensor warms up by about 7°C (depending on supply voltage and ventilation).

www.sensirion.com

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