ZX2

3

Sensor Head

47.

47.5mm

mm

47.5mm

35.5mm

22.6mm

* If the room temperature varies 1°C, the measured value varies 0.02% F.S.

(corresponding to 4µm for the Model ZX2-LD50)

* According to OMRON investigation of CMOS laser

displacement sensors performed in September 2010.

Cable can be

fed through

from the back

World smallest*

Compact sensor for easy mounting

IP67, robot cable

& temperature characteristic 0.02% F.S./°C

Reliable measurements in harsh environments

Spot beam

Precise measurement on

micro-scale objects

Line beam

Stable measurement on

rough-surfaced objects

Regular-reflective

Stable wafer

measurement

1.5 µm

Line beam

Spot beam

Line beam

Approx.60µm×2.6mm

Spot beam

Approx.60µm dia.

ZX2-LD50

Spot beam type

5µm

Line beam

Spot beam

Line beam

Approx.110µm×2.7mm

Spot beam

Approx.110µm dia.

ZX2-LD100

Spot beam type

1. 5 µm

Spot beam

±0.3%F.S.

Spot beam

Approx.60µm dia.

*1 Using 40 to 50mm

*2 Using 65 to 100mm

(regular-reflective)

Sensor Heads for Various Applications-select

the Range and Type of Beam

New Regular-reflective Sensor Head Designed for Optimal Wafer Measurement

IP67 protection class enables to use the sensor in harsh

environments. A robot cable is used as standard between the

head and amplifier, that the unit can be used reliably on moving

parts. In addition, as 3D UV bond is used to fix the optical

components rather than screws, stress can be controlled and a

temperature characteristic 0.02% F.S./°C* is realized.

The world’s smallest CMOS laser displacement sensor

head is realized in a resin case. Enables to mount the

sensor in smallest spaces and to minimize measure-

ment errors arising from temperature fluctuations.