Ordering Information

SmartPower - 11/17

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Specifications are subject to change without notice.

Please contact your local MKS sales office for price and availability information.

Dimensional Drawing —

Note: Unless otherwise specified, dimensions are nominal values in inches.

MKS Instruments, Inc.

Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810

Tel:

978.645.5500

Tel:

800.227.8766 (in USA)

Web: www.mksinst.com

MKS Instruments, Inc.

Plasma & Reactive Gas Solutions

90 Industrial Way

Wilmington, MA 01887

Tel:

978.284.4000