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AX2500 датащи(PDF) 3 Page - MKS Instruments. |
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AX2500 датащи(HTML) 3 Page - MKS Instruments. |
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3 / 4 page ![]() Specifications Overall systems Power Output AX2518: 180 W to 1.8 kW AX2530: 300 W to 3.0 kW Frequency 2440 - 2470 MHz Regulation Better than 1% of output power (line and load) Ripple AX2518: ±1% of output power AX2530: ±1% of output power Output Accuracy AX2518: ±1.5% (from 20-100% of max. power) AX2530: ±1.5% (from 20-100% of max. power) Ambient Temperature Up to 40°C maximum Generator to Head Distance Up to 100 feet maximum Microwave Connections WR284F waveguide with CPR284F flanges Remote Control Analog, RS485, DeviceNet™ AC Power Input 200/208 VAC ±10%, 3 phase, 50/60 Hz Compliance CE (option configuration), ETL, SEMI F47, SEMI S2-93A Generator (ax2518ps, ax2530ps) Size 7.0''H x 19''W x 23''L (178 x 483 x 584mm) Cooling Water, 1.5 gpm, 30°C maximum @ 30 psid minimum power Heads AX2518RH, AX2530RH 10''H x 7.62''W x 14.5''D (254 x 193.5 x 368.3mm) Cooling Water, air |
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