Specifications

Performance

Mass Range options

1-100 amu standard; 1-200 and 1-300 amu optional

Ion Source

High conductance closed ion source

Filaments

Replaceable twin Tungsten or Thoria filaments

Doublefilter(1”“RFonly”pre-filterwith4”mainfilter)

Detector System

Dual(Faradayandsecondaryelectronmultiplier)

Maximum Analyzer operating Pressure

7.6e-3 Torr (1e-2 mbar) at the ion source inlet (standard), higher pressure optional

Minimum Detectable Partial Pressure

<2e-11 Torr (for total pressures <1 x e-4 Torr on inlet)

Minimum Detectable Concentration

<100ppb for all common gases except <10ppm for H

2

(trace gas detection limit)

Mass Stability

Better than ±0.1 amu over 8 hours

Resolution

Better than 10% valley between peaks of equal height throughout the mass range

Analyzer & Housing

Vacuum Hardware

60 l/s Turbomolecular pump with high conductance analyzer housing, inlet system, right

angle valve, automated vacuum controller (RVC) completely inter locked and integrated.

ForelinePump

Dry diaphragm standard; other options available

Analyzer Housing Base Pressure

Better than 5e-9 Torr after bakeout

Bakeout Temperature & Bakeout Jacket

Included for 180°C bakeout

Total Weight

33 lbs. (15 kg) to bolt on Process System

Mechanical Support

optional stands and brackets are available

Mobile RGA Platform

optional RGA trolley to improve versatility (footprint 18x24”, 455x604mm)

Pneumatics

60-80 psig CDA

Control Unit/PC

Control Module Weight

1.7 kg

Power

88-264 VAC, 47/63 Hz, 600 Watts

Maximum operating Conditions

Electronics: 10-40°C, 80% RH (non-condensing)

LED Status Indication

Interlock status, filament emission, SEM, power and communications

I/o Capability

4 analog inputs and 2 outputs (plus 1 dedicated gauge input). optional support for a large

number of both analog and digital inputs and outputs, including relay control

OtherFacilities

Leak check headset socket, external filament trip socket, instrument reset

Software

Process Eye Professional fully network compatible control platform generating under

Communications

Ethernet CAT-5e

Minimum PC Specification Required

upon total number of sensors on the computer and the operating system in use. Multi-

Sensor installation may require higher specifications.

Simultaneous Multi-Sensor

Process Eye Professional client/server configuration offers flexible multi-sensor operation.

Compliance

CE

RGA Controller to Vacuum System Cables

Length

33’ (10 m) standard RGA and 10’ (3m) with mobile RGA platform. other lengths available

dependent upon process system and customer requirements

Total Shipping Weight

44 lbs (20 Kg) may vary depending upon backing pump and instrument rack requirements