Description

Closed Ion Source

Each Vision 2000-P incorporates a closed ion source

and a custom inlet valve with an optimized high conduct-

ance, low surface area path to the PVD process chamber.

With this source, the system is able to monitor the

complete PVD process cycle, from base vacuum to

process pressures of up to 1e-2 mbar, without the need

for a pressure reduction inlet.

By maximizing the ratio between process gas signals

and the gas background in the differentially pumped

Vision 2000-P analyzer housing, the closed ion source

enables ppb levels of detection for trace contaminants in

the process gas. Exceptionally good residual hydrogen

detection can be achieved with the high performance

electronics.

Remote Vacuum Controller

Each Vision 2000-P system incorporates a Remote

Vacuum Controller (RVC) module that provides fail-safe

protection for both the process tool and the RGA.

Furthermore,itallowsfulloperationandcontrolofRGA

system components (filaments, pumps, inlet valves, etc.)

from the system PC. The compact, remotely mounted

rack module includes the RVC and power supplies. The

unit is easily mounted onto any standard 19” tool rack

for mounting on a process chamber or other compatible

location. 33’ (10 m) cables for ease of remotely locating

the probe assembly are included as standard.

Mobile RGA Platform

Any Vision 2000-P can be mounted on a mobile RGA

platform with the convenience of being able to move the

RGA easily between chambers as the need arises. The

mobile platform has an integrated laptop table and mounts

the electronics on the trolley. Using a standard 10 foot (3m)

cable loom the platform can be conveniently located away

from the RGA mounting point on the tool chamber.

The Vision 2000-P analyzer uses Process Eye

Professional, a highly flexible, modular application

operating under 32bit or 64bit Windows XP, Vista, Server

2008 or Windows 7. Designed with a “client/server”

structure, Process Eye Professional incorporates TCP/

IP protocol for full network compatibility. Process Eye

Professional uses recipes to specify the way in which the

instrument scans, displays data, and responds to the data

acquired. Recipes are user configurable using the “Recipe

Wizard” and are ideal for monitoring repetitive processes

and analyses.

Associated bar chart spectra and recently captured spectra

are stored in a data buffer for easy review. Recipes can

be linked together for the optimum monitoring of various

phases of a particular process, or to facilitate automatic

calibration using pre-defined calibration recipes. The single

button push (or external signal) initiation of a Process Eye

Professional recipe eliminates the need for highly skilled,

full time operators.

The flexibility of Process Eye Professional allows recipes

to be configured that will:

• Definedataacquisitionanddatadisplayparameters,

along with any on-line data processing required to

convert data into relevant units and information

• Displaydatainsimultaneous“barchart”and“datatrend”

formats, allowing the comprehensive and clear

investigation of significant trend events

• Incorporatecustomwarningsandalarms,triggeredor

terminated when data highlights that process conditions

have deviated from normal conditions

• Monitoranddisplayotherparametersastrends,in

relevant units (temperature, gas flow rate, power,

pressure, etc.) which are linked into the Vision 2000-P

analyzer through its flexible analog and digital I/o

In addition, Process Eye Professional provides “live

history” for quick on-line review of data trend events.

Recently captured bar chart spectra are stored in a data

buffer and can be reviewed by moving a cursor over the

associated trend plot.

Simultaneous log bar chart/trend analysis display, illustrating wide dynamic

range scanning. Power supply potentials versus time is also shown.

Standard bar chart with log pressure axis