VACUUM BASELINE MONITOR FOR PROCESS TOOLS

that can negatively impact the quality of product – for example, aluminum deposition

can be negatively impacted by the presence of O

film characteristics and surface roughness. The Vision 2000-B features the “smart head”

technology from the Microvision 2. The electronics unit mounts directly onto the analyzer

head, and connects to the system PC via an ethernet interface. The open ion source

analyzer incorporates twin filaments, where the second “back-up” filament enables continued

operation in the event of a filament failure. The user serviceable analyzer design allows the

ion source to be easily removed and dismantled for cleaning. The standard system includes

a double-filter analyzer for increased sensitivity of higher mass species, contamination

resistance and enhanced long term stability. In addition, systems can be equipped with a

heater jacket and pneumatic isolation valve. A 3-way pneumatic valve for manual control

of isolation inlet valve is standard and optional pressure switch assemblies can be chosen

to detect within milliseconds when a valve has opened or closed on the tool. This provides

Vision 2000-B systems with the flexibility to fully satisfy the application requirements of any

vacuum baseline RGA process.

Features & Benefits

• 100amustandardmassrange,200amu

and 300 amu optional mass ranges

• Housingsandheaterjackettomeetneeds

of any process tool and vacuum baseline

application

— Automated, recipe based operation

— User configurable, intelligent alarms

— High level tool integration

— Advanced data presentation

(i.e. simultaneous bar chart/trend

screen displays and display of valve

movements)

• Simultaneousmultiple-sensoroperation

capability

• Integrationwithtoolsforinterdictionand

alarms

• Alarmlevelsthatdynamicallychange

based on the slit valve positions (when

used in conjunction with TOOLweb RGA)

Applications

The Vision 2000-B is an application

specific instrument designed to monitor

vacuum pumpdown, baseline, and leakback

conditions on semiconductor and thin film

process tools, and to alert of conditions

that can negatively impact product yield.

In addition, the Vision 2000-B provides the

information required to optimize vacuum

quality with

• Residualgasmonitoring,includingairand

water

• Contaminantmonitoring,including

Hydrocarbons