Description

The Vision 2000-B analyzer uses Process Eye

Professional, a highly flexible, modular application

operating under 32bit or 64bit Windows XP, Vista, Server

2008 or Windows 7. Designed with a “client/server”

structure, Process Eye Professional incorporates

TCP/IP protocol for full network compatibility.

Process Eye Professional uses recipes to specify the way

in which the instrument scans, displays data, and responds

to the data acquired. Recipes are user configurable using

the “Recipe Wizard” and are ideal for monitoring the

various phases of repetitive recipes.

Recipes can be linked together to address different

monitoring conditions or to facilitate automatic calibration

(using pre-defined calibration recipes). The single

button push (or external signal) initiation of a Process

Eye Professional recipe eliminates the need for highly

skilled, full time operators. The flexibility of Process Eye

Professional allows recipes to be configured that will:

• Definedataacquisitionanddatadisplayparameters

• Displaydatainsimultaneous“barchart”and“data

trend” formats, allowing the comprehensive and clear

investigation of significant trend events

• Incorporatecustomwarningsandalarms,triggered

or terminated when data highlights that process cond-

itions have deviated from normal conditions or when

specific events occur (e.g. valves opening/closing)

• Monitoranddisplayotherparametersastrends,in

relevant units (temperature, gas flow rate, power,

pressure, etc.) which are linked into the Vision 2000-B

analyzer through its flexible analog and digital I/O

In addition, Process Eye Professional provides “live history”

for quick on-line review of data trend events.

Recently captured bar chart spectra are stored in a data

buffer and can be reviewed by moving a cursor over the

associated trend plot.

TOOLweb® RGA

Using TOOLweb RGA sensor integration option for process

tools, the Vision 2000-B can be used as a transfer,

buffer or loader chamber sensor in a completely automated

process environment. TOOLweb RGA maintains a constant

monitor of tool activities with all sensor data being framed

by wafer logistics before alarm models are applied. Full

alarm and data reporting to the FAB host and FDC are

available so real time monitoring of chamber conditions

and flagging of any process excursions from ideal

conditions is possible.

timing of slit valve pressure switch sensors compared to using SVIDS from

the tool allows accurate diagnosis of which slit valve is causing an air leak

on actuation.

module. The dashboard view presents a complete status report and auto-

mated alarm analysis on one page.