628F datasheet(7/16 Pages) MKS

7 / 16 page

Specifications

625F

631D

E27F

E28F

E29F

D24F

D25F

D27F

D28F

Heated to 100°C,

15-pin D-connector,

Relays

Heated to 150°C

or 200°C, 15-pin

D-connector,

Relays Optional

Etch Sensor, Heated to

45°C, 15-pin

D-connector

Etch Sensor, Heated

to 100°C, 15-pin

D-connector

Etch Sensor, Heated to

45°C or 100°C,

9-pin D-connector

Dual Range,

Heated to 45°C,

15-pin D-connector,

Relays

Dual Range,

Heated to 100°C,

15-pin D-connector,

Relays

Dual Range,

Heated to 45°C,

15-pin D-connector

Dual Range,

Heated to 100°C,

15-pin D-connector

1, 10, 20, 100, 500,

1000, 2000, 5000,

10000, 15000, and

20000 (1.33 to 26315)

1, 2, 10, 100, and 1000

(1.33 to 1333)

0.02, 0.05, 0.1, 0.25,

1, 2, 10, 20, and 100

(0.026 to 133)

0.05, 0.1, 0.25, 1, 2,

10, 20, and 100

(0.026 to 133)

0.02, 0.05, 0.1, 0.25, 1,

2, 10, 20, and 100 (0.026

to 133)

10, 100, and 1000

(13.3 to 1333)

10, 100, and 1000

(13.3 to 1333)

1, 10, 100, and 1000

(1.33 to 1333)

1, 10, 100, and 1000

(1.33 to 1333)

0.25%

0.50%

0.12% for 1 Torr and

above; 0.15% for 0.25,

0.1, and 0.05 Torr;

0.25% for 0.02 Torr

0.25% for 1 Torr and

above; 0.50% for below

1 Torr

For 45°C models: 0.12%

for 1 Torr and above;

0.15% for 0.25, 0.1, and

0.05 Torr. For 100°C

models: 0.25% for 1 Torr

and above; 0.50% for

below 1 Torr.

0.12%

0.25%

0.12%

0.25%

0.001%

0.001% for 0.10 Torr

and higher; 0.002% for

<0.10 Torr.

0.001% for 0.10 Torr

and higher; 0.002% for

<0.10 Torr.

0.001% for 0.10 Torr

and higher; 0.002% for

<0.10 Torr.

0.001%

0.002%

150°C models: 0.004%

for 10 Torr and higher;

0.006% for 1 and 2

Torr. 200°C models:

0.008% for 10 Torr and

higher; 0.016% for 1

and 2 Torr.

0.002% for 1 Torr and

higher; 0.005% for 0.1

and 0.25 Torr; 0.015%

for 0.05 Torr; 0.030%

for 0.02 Torr

0.002% for 1 Torr and

higher; 0.010% for 0.1

and 0.25 Torr; 0.015%

for 0.05 Torr

Same as E27F and E28F

specifications for 45°C

and 100°C temperatures.

0.002%

0.02%

0.10%

0.02%

15 to 50°C

15 to 40°C

15 to 50°C

45°C models: 15 to

40°C. 100°C models: 15

to 50°C.

15 to 40°C

15 to 50°C

15 to 40°C

15 to 50°C

2 hours for 1 Torr and

higher; 4 hours for

<1 Torr

4 hours

2 hours for 1 Torr and

higher; 4 hours for

<1 Torr

2 hours for 1 Torr and

higher; 4 hours for

<1 Torr

2 hours for 1 Torr and

higher; 4 hours for

<1 Torr

2 hours

45 psia

Inconel and Incoloy

alloys

Inconel and Incoloy

alloys

Inconel and Incoloy

alloys

Inconel and Incoloy

alloys

Inconel and Incoloy alloys Inconel and Incoloy

alloys

Inconel and Incoloy

alloys

Inconel and Incoloy

alloys

Inconel and Incoloy

alloys

6.3

6.2

6.3

±15VDC (±5%) @ 600

mA max

±15VDC (± 5%) @ 1.0

A max

±15VDC (±5%) @ 250

mA max

±15VDC (±5%) @ 500

mA max

Same as E27F and E28F

specifications for 45°C

and 100°C temperatures.

±15VDC (±5%) @ 400

mA max

±15VDC (±5%) @ 600

mA max

±15VDC (±5%) @ 250

mA max

±15VDC (±5%) @ 500

mA max

0-10VDC into > 10

k-ohms

0-10VDC into > 10

k-ohms

0-10VDC into > 10

k-ohms

0-10VDC into > 10

k-ohms

0-10VDC into > 10

k-ohms

0-10VDC into > 10

k-ohms

0-10VDC into > 10

k-ohms

0-10VDC into > 10

k-ohms

0-10VDC into > 10

k-ohms

(2) independent relays,

SPDT contacts rated

at 1 amp @ 30VDC

or 0.5 amp @ 30 VAC

resistive. Each relay

adjustable from 0.1%

to 100% of FS range.

12.5 k ohm max source

impedance.

(2) process pressure

& (1) heater failure trip

relay mounted inter-

nally. Pressure relays

independently adjust-

able from 0-100% FS,

DPDT contacts rated at

1 amp @ 30VDC

or 0.5 amps @ 30VAC.

Relays conform to UL-

1950 Basic Insulation

at 125V.

Not Applicable

(2) independent relays,

SPDT contacts rated

at 1 amp @ 30VDC

or 0.5 amp @ 30 VAC

resistive. Each relay

adjustable from 0.1%

to 100% of FS range.

12.5 k ohm max source

impedance.

(2) independent relays,

SPDT contacts rated

at 1 amp @ 30VDC

or 0.5 amp @ 30 VAC

resistive. Each relay

adjustable from 0.1%

to 100% of FS range.

12.5 k ohm max source

impedance.

Not Applicable

15-pin D-subminiature

with thread locks, 15-

pin D-subminiature with

slide locks, terminal

block adapter, 15-pin D-

subminiature, filtered

15-pin D-subminiature

with thread locks

15-pin D-subminiature

with thread locks

15-pin D-subminiature

with thread locks

9-pin D-subminiature

with thread locks

15-pin D-subminiature

with thread locks

15-pin D-subminiature

with thread locks

15-pin D-subminiature

with thread locks

15-pin D-subminiature

with thread locks

1/2" OD (12.7 mm)

tubulation

1/2" OD (12.7 mm)

tubulation

1/2" OD (12.7 mm)

tubulation

1/2" OD (12.7 mm)

tubulation

1/2" OD (12.7 mm)

tubulation

1/2" OD (12.7 mm)

tubulation

1/2" OD (12.7 mm)

tubulation

1/2" OD (12.7 mm)

tubulation

1/2" OD (12.7 mm)

tubulation

8 Female VCR, 1.33"

OD Conflat, NW16-KF,

NW 16 KF (right

angle), NW25-KF

8 Female VCR, NW16-

KF, 1.5" OD TriClover, 2"

OD TriClover

8 Female VCR, 1.33"

OD Conflat, NW16-KF

8 Female VCR, 1.33"

OD Conflat, NW16-KF

8 Female VCR, 1.33" OD

Conflat, NW16-KF

8 Female VCR, 1.33"

OD Conflat, NW16-KF,

NW25-KF

8 Female VCR, 1.33"

OD Conflat, NW16-KF,

NW25-KF

8 Female VCR, 1.33"

OD Conflat, NW16-KF,

NW25-KF

8 Female VCR, 1.33"

OD Conflat, NW16-KF,

NW25-KF

15-pin D-connector with

slide locks; Terminal

Block Adaptor

Relay Settings

Heater Status

Indication; Horizontal

Calibration

Heater Status

Indication; Horizontal

Calibration

Heater Status Indication;

External Zero Adjust (not

available

on 0.02 Torr/45°C or 0.05

Torr/100°C

configurations;

Horizontal calibration

15-pin D-subminiature

with slide locks

15-pin D-subminiature

with slide locks

15-pin D-subminiature

with slide locks

15-pin D-subminiature

with slide locks

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