• Full Scale pressure/vacuum ranges as low as 0.02

Torr (mm Hg) allow for accurate measurement of

• All products are specified in percent of reading for

best accuracy and improved process yield

• Complete line of absolute manometers including

products operating at internal temperatures of up to

200°C. Widest product range and applications

experience available anywhere

• Direct measurement of chamber total pressure

independent of gas type or composition, eliminating

need for lookup tables and conversion factors

• Best-available long-term output stability ensures

state-of-the-art process repeatability in nearly any

application

basic sensor operates without damage in virtually

any chemical environment, including halogens,

deionized water and steam, and ozone

• High overpressure limit ensures reliability from

occasional system mishaps

600 Series Analog

Capacitance Manometers

capacitance manometers are designed for accurate,

repeatable pressure and vacuum measurements in

demanding production or research process environments.

The proven sensor, electronics, and packaging designs

combine to provide the most stable and reliable low-

pressure measurement instrument available.

Product Description

The MKS 600 Series Baratron capacitance manometers

are analog capacitance-based pressure and vacuum

gauges that require ±15VDC input power and provide a

high-level 0-10VDC output signal linear with pressure. This

analog output can be interfaced with an MKS pressure

controller, an MKS power supply/display instrument, or

any instrument that meets these requirements. Changes

in pressure/vacuum are determined by measuring the

change in capacitance between the sensor’s diaphragm

and an adjacent electrode disk. This capacitance change

is converted to a useable output by patented signal-

conditioning electronic circuits. The radially-tensioned

Inconel diaphragm in the sensor provides very fast

response (<20 msec in many cases), low hysteresis,

excellent repeatability, very high resolution (to 0.001% of

Full Scale), exceptionally high corrosion resistance, and

double-walled welded construction for operator safety.

The sensor itself can withstand repeated exposures to

45 psia (3.1 bar) without permanent degradation or

shifting, allowing it to operate in virtually any process

system.

Features and Benefits