www.sensirion.com

Version 10 –February 2015

1/7

SLI Liquid Flow Meter Series

Media Isolated Microfluidic Flow Meter



Liquid flow rates up to 5 ml/min



Non-invasive Measurement



Different Interface Options



40 ms Flow Detection Response Time

Product Summary

Interface Options

The SLI Liquid Flow Meter enables fast, non-invasive

measurements of very low liquid flow in the µl/min- to

ml/min-range. Excellent chemical resistance and bio-

compatibility are ensured: The flow path of the SLI

Liquid Flow Meter is formed by a simple, straight glass

capillary. The fourth generation MEMS sensors

combine a thermal high precision sensor element with

amplification circuits and digital intelligence for

linearization and temperature compensation on one

single microchip – the product’s core element.

Digital

- I2C-Bus

- RS485-Bus

- USB Cable

Analog

- Voltage Output (0-10 V)

- Additional operation

modes

For more information on communication, please refer

to page 2 of this document.

1 Sensing Performance

Parameter

SLI-0430

SLI-1000

SLI-2000

Unit

80

1000

5000

µl/min

120

1100

5500

µl/min

Accuracy below full scale

(whichever error is larger)

5.0

5.0

5.0

0.15

0.2

0.2

% of full scale

Repeatability below full scale

(whichever error is larger)

0.5

0.5

0.5

% of m.v.

0.01

0.02

0.02

% of full scale

Temperature coefficient

(additional error / °C; whichever is larger)

0.13

0.1

0.1

% m.v. / °C

0.003

0.004

0.004

% full scale / °C

<0.4

1.0

1.5

% of full scale

Flow detection response time

40

ms

Response time on power-up

120

ms

Operating temperature

+10…+50

°C

-10…+60

°C

Operating pressure

50

15

15

bar

Proof pressure

150

30

30

bar

a

Flow rate at which the sensor output saturates. See Section 2 for performance between full scale and saturation point

b

Measured value

c

Maximum additional offset when mounted vertically

d

Non-condensing, flow path empty