SFC4000 datasheet(7/15 Pages) ETC2

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CMOSens SFC4000 Mass Flow Controller for Gases

www.sensirion.com

Product InformationJanuary 2012 – v2.6

7/15

2.5 Wetted Materials & Compatibility

The packaging method ensures that a minimum

number of inert materials only is wetted by the gas

which is controlled by the SFC4000 MFC.

The following Table 2 gives an overview of the

materials wetted by the gas.

Table 2: Overview of Wetted Materials

PC Part

Wetted Material

Body

Aluminium

Sensor element

Silicon (Si)

Silicon oxide (SiOx)

Silicon nitride (Si3N4)

Stainless Steel

Glass

Glob Top

Sealing

Viton

Valve15

Brass

Viton

For high volume OEM applications also different

specialized materials for the body, the valve and the

sealing can be configured.

2.6

Operation with different gas types

The CMOSens SFC4000 Mass Flow Controller is

available in different versions. For all versions the

safety instructions in chapter 2.7 must be observed.

For standard applications a cost effective off-the-shelf

version calibrated with N2 or Air is the best choice.

This also ensures short lead times at comparably low

costs.

For volume customers other gas type calibrations are

available on request and availability. Please contact

Sensirion for further details if this option is applicable

to you.

2.7

Safety Instructions

The CMOSens SFC4000 is designed for the use of

a wide range of various types of gases. The vacuum

tight stainless steel packaging of the CMOSens chip

together with the housing and sealing materials

valve for volume OEM applications also available with Stainless

Steel body instead of brass body and Kalrez instead of Viton.

ensure a tight and highly resistant sealing of the

controller. Furthermore, each controller is thoroughly

leak tested during the manufacturing process.

In addition the electronic circuit is designed in such a

way that the maximum heating energy of the sensor

is limited to 12 mW in every circumstance (even in the

case of a failure).

For safety reasons however Sensirion strongly

recommends to maintain also the following

instructions:

Toxic gases

The whole gas assembly must be checked for

leakage before applying toxic gas to the device.

Explosive gases

The CMOSens sensor element is tested according

to EN 50020 chapter 6.2.4 b). Sensirion guarantees

the safe use of gases of the classes T1 or T2 (ignition

temperature

 300 °C). This includes also mixtures of

air or oxygen with hydrogen or hydrocarbons.

However the SFC4000 is not designed for the use in

hazardous areas (EN 6079-10) where explosive

gases can occur outside of the controller.

Aggressive or corrosive gases

Please make sure that the gases you use are

compatible with the wetted materials listed in Table 2,

chapter 2.5. In case of doubt please contact Sensirion

for further advice.

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