1

Motorola Sensor Device Data

100 kPa

On-Chip Temperature

Compensated & Calibrated

Silicon Pressure Sensors

The MPX2100 and MPX2101 series device is a silicon piezoresistive pressure sensors

providing a highly accurate and linear voltage output — directly proportional to the

applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain

gauge and a thin–film resistor network integrated on–chip. The chip is laser trimmed for

precise span and offset calibration and temperature compensation.

Features

• Temperature Compensated Over 0°C to +85°C

• Unique Silicon Shear Stress Strain Gauge

• Easy to Use Chip Carrier Package Options

• Available in Absolute, Differential and Gauge Configurations

• Ratiometric to Supply Voltage

•±0.25% Linearity (MPX2100D)

Application Examples

• Pump/Motor Controllers

• Robotics

• Level Indicators

• Medical Diagnostics

• Pressure Switching

• Barometers

• Altimeters

Figure 1 illustrates a block diagram of the internal circuitry on the stand–alone

pressure sensor chip.

Figure 1. Temperature Compensated Pressure Sensor Schematic

VS

3

X–ducer

SENSING

ELEMENT

THIN FILM

TEMPERATURE

COMPENSATION

AND

CALIBRATION

CIRCUITRY

2

4

Vout+

Vout–

1

GND

VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE

The differential voltage output of the X–ducer is directly proportional to the differential

pressure applied.

The absolute sensor has a built–in reference vacuum. The output voltage will decrease

as vacuum, relative to ambient, is drawn on the pressure (P1) side.

The output voltage of the differential or gauge sensor increases with increasing

pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly,

output voltage increases as increasing vacuum is applied to the vacuum (P2) side

relative to the pressure (P1) side.

Preferred devices are Motorola recommended choices for future use and best overall value.

Senseon and X–ducer are trademarks of Motorola, Inc.

Order this document

by MPX2100/D

MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

BASIC CHIP

CARRIER ELEMENT

CASE 344–15, STYLE 1

DIFFERENTIAL

PORT OPTION

CASE 344C–01, STYLE 1

MPX2100

MPX2101

SERIES

0 to 100 kPa (0 to 14.5 psi)

40 mV FULL SCALE SPAN

(TYPICAL)

NOTE: Pin 1 is the notched pin.

PIN NUMBER

1

2

Gnd

+Vout

3

4

VS

–Vout

Motorola Preferred Device

REV 6