17

Magnetic

Sensor

Piezo

Sensor

Resistive

Sensor

MEMS Pressure Sensor

HSPP

Small size pressure sensor with growing applications.

Piezo resistance type pressure sensor.

Small and low profile(

□2.5mm × t0.7mm).

Features a lineup consisting of a single element, compact

type and a built-in amplifier high-output type.

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Features

For pressure and altitude detection of portable navigation

devices, mobile phones, pedometers, etc.

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Applications

Style

Dimensions

Unit:mm

Piezo Sensor

Output voltage/110kPa(mV)

Span voltage(mV)

Function

Size

Operating pressure(kPa)

Operating temperature

(℃)

Supply current(mA)

・Voltage(V)

Typical Specifications

Items

HSPPAR

Specifications

Small and low profile

2.5

2.5

0.7mm

50 to 110

-20 to +85

Icc= 0.55mA

44

HSPPAA

with amplifier

3.5

3.5

1.0mm

Pressure type

Absolute pressure

Vdd= 2.5

0.125V

870

79

1600

Output voltage/101.3kPa(mV)

（72.6）（1474）

Temperature characteristics of

offset voltage(%FS)

-4to+6

Temperature characteristics of

span voltage(%FS)

-4to+4

Bridge resistance(

kΩ)

5to7

−

Output impedance(

kΩ)

−

7to13

3.5

1.0 max.

0.1

0.9

1.5

2.5

0.7 max.

0.5 1.22

Compact type HSPPAR

Type with amplifier HSPPAA