MPXV6115V

Sensors

Freescale Semiconductor, Inc.

5

3

On-chip Temperature Compensation and Calibration

Figure 3 illustrates the absolute sensing chip in the basic small outline chip carrier ().

Figure 4 shows a typical application circuit (output source current operation).

Figure 5 shows the sensor output signal relative to pressure input. Typical minimum and maximum output curves are shown for

operation over 0 to 85 °C temperature range. The output will saturate outside of the rated pressure range.

A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be

transmitted to the silicon diaphragm. The MPXV6115V series pressure sensor operating characteristics, internal reliability and

qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor

performance and long-term reliability. Contact the factory for information regarding media compatibility in your application.

The MPXV6115V is optimized to perform in vacuum pressures applied to port P1. The sensor is calibrated and temperature

compensated to give a positive electrical output upon measuring a vacuum pressure up to the rated pressure of up to -115 kPa

where the output will be the full-scale voltage listed in Table 3.

Figure 3. Cross-sectional diagram (not-to-scale)

Figure 4. Typical application circuit (output source current operation)

Fluorosilicone

Gel Die Coat

Differential Sensing

Element

Stainless

Steel Cap

P1

P2

Die Bond

Die

Thermoplastic

Case

Lead

Frame

Wire

Bond

VS

+5.1 V

GND

VOUT

To ADC

1

μF

51 K

47 pF

100 nF