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PRO560LM SPECIFICATIONS

Electrical Specifications

Drive System

Brushless Linear Servomotor

Feedback

Non-contact Linear Encoder

-E1: 1 Vpp, 20 µm signal period

-E2: Digital RS422, 0.1 µm electrical resolution

Maximum Bus Voltage

340 VDC

Limit Switches

5 V, Normally-Closed

Home Switch

Near Center

Notes:

1. Certified with -PL1/-PL2 option.

2. Requires the selection of an appropriate amplifier with sufficient voltage and current.

3. Axis-orientation for on-axis loading is listed.

4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent.

Contact factory for multi-axis applications.

Mechanical Specifications

PRO560LM

Travel

300

400

500

600

800

1000

Accuracy(1)

Standard

±10 µm

±12 µm

±14 µm

±15.5 µm

±17 µm

±18 µm

Calibrated

±1 µm

±1 µm

±1 µm

±1 µm

±1.5 µm

±1.5 µm

Resolution (Min.

Incremental Motion)

5 nm (-E1 Encoder)

Bidirectional Repeatability(1)

±0.4 µm

±0.4 µm

±0.4 µm

±0.4 µm

±0.5 µm

±0.5 µm

Horizontal Straightness(1)

±3 µm

±4 µm

±5 µm

±6 µm

±7 µm

±8 µm

Vertical Straightness(1)

±3 µm

±4 µm

±5 µm

±6 µm

±7 µm

±8 µm

Pitch

49 µrad

60 µrad

70 µrad

78 µrad

90 µrad

110 µrad

Roll

39 µrad

44 µrad

53 µrad

58 µrad

73 µrad

87 µrad

Yaw

49 µrad

60 µrad

70 µrad

78 µrad

90 µrad

110 µrad

Maximum Speed(2)

2 m/s

Maximum Acceleration(2)

3 g

Maximum Force, Continuous

532.4 N – Standard

792.6 N – With Air Cooling (20 psig)

Load

Capacity(3)

Horizontal

150 kg

Side

150 kg

Moving Mass

25.0 kg

Stage Mass

90.4 kg

99.5 kg

108.6 kg

117.7 kg

135.9 kg

154.1 kg

Material

Anodized Aluminum

MTBF (Mean Time

Between Failure)

20,000 Hours