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PRO225LM SPECIFICATIONS

Notes:

1. Certified with -PL1/-PL2 option.

2. Requires the selection of an appropriate amplifier with sufficient voltage and current.

3. Axis-orientation for on-axis loading is listed.

4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent.

Contact factory for multi-axis applications.

Mechanical Specifications

PRO225LM

Travel

100

200

300

400

Accuracy(1)

Standard

±4 µm

±8 µm

±10 µm

±12 µm

Calibrated

±1 µm

±1 µm

±1 µm

±1 µm

Resolution (Min.

Incremental Motion)

5 nm (-E1 Encoder)

Bidirectional Repeatability(1)

±0.3 µm

±0.4 µm

±0.4 µm

±0.4 µm

Horizontal Straightness(1)

±1.5 µm

±2.5 µm

±3.5 µm

±4.5 µm

Vertical Straightness(1)

±1.5 µm

±2.5 µm

±3.5 µm

±4.5 µm

Pitch

25 µrad

39 µrad

50 µrad

60 µrad

Roll

27 µrad

39 µrad

50 µrad

60 µrad

Yaw

27 µrad

39 µrad

50 µrad

60 µrad

Maximum Speed(2)

2 m/s

Maximum Acceleration(2)

3 g

Maximum Force,

Continuous

153 N – Standard

251.6 N – With Air Cooling (20 psig)

Load

Capacity(3)

Horizontal

100 kg

Side

100 kg

Moving Mass

8.4 kg

Stage Mass

23.8 kg

26.9 kg

30.1 kg

33.3 kg

Material

Anodized Aluminum

MTBF (Mean Time

Between Failure)

20,000 Hours