IndyStar is a rugged high-duty cycle excimer laser designed for fast pulse frequency applications as high as 2000 Hz.

Based on proven ALMETA tube technology, the Semi-S2 certified IndyStar operates over many billion pulses at ultra-short

193 nm and 248 nm wavelengths. The IndyStar series is engineered to meet the highest demands in every aspect of an

industrial laser.

Fast Pulse, High Precision Processing

IndyStar

Excimer Lasers

FEATURES

APPLICATIONS

• Repetition rate of 1 and 2 kHz for fast processing

• TimeLok and PowerLok functionalities for ultimate

pulse control

• ALMETA tube design to ensure most efficient

processing

• Semi-S2 compliance and premix gas supply to

facilitate production floor integrations

• Photomask Inspection

• Inkjet Nozzle Drilling

• Optics Testing