SCR150

Nanopositioning Stage

Specifications1

Units

SCR150-100 SCR150-150 SCR150-200 SCR150-250

SCR150-300

Travel/Stroke2

mm

100

150

200

250

300

Stage Width (B)

mm

230

280

330

380

430

Stroke

mm

100

150

200

250

300

Accuracy

μm

5

7

9

11

12

Encoder Resolution

nm

1000, 500, 100, 50, 10

Bi-Directional Repeatability3

±1 count

Maximum Acceleration

m/s2

17

13

11

9

8

Maximum Velocity4

m/s

1.3

1.3

1.4

1.5

1.5

Load Capacity5

kg

45.5

Moving Mass

kg

2.3

2.9

3.5

4.1

4.7

Total Mass

kg

5.2

6.5

7.9

9.2

10.6

Straightness & Flatness

μm

2/25mm

Home Limit Switches

Standard

Home Switch Location

Center

Limit Switch Over Travel

mm

1

Hard Stop Over Travel

mm

2

Bearing

Cross-roller bearing

Linear Shaft Motor

S160D

Stage Specifications

SCR150-150

0.10

1.00

10.00

100.00

0.0

9.1

18.2

27.3

36.4

45.5

Load Mass

0

200

400

600

800

1000

1200

1400

1600

1800

Acceleration D coil

Max Velocity D coil

SCR150-250

0.10

1.00

10.00

100.00

0.0

9.1

18.2

27.3

36.4

45.5

Load Mass

0

500

1000

1500

2000

2500

Acceleration D coil

Max Velocity D coil

SCR150-300

0.10

1.00

10.00

100.00

0.0

9.1

18.2

27.3

36.4

45.5

Load Mass

0

500

1000

1500

2000

2500

Acceleration D coil

Max Velocity D coil

SCR150-100

0.10

1.00

10.00

100.00

0.0

9.1

18.2

27.3

36.4

45.5

Load Mass

0

200

400

600

800

1000

1200

1400

1600

Acceleration D coil

Max Velocity D coil

(kg)

(kg)

(kg)

(kg)

Acceleration/Velocity Curves

Note 1: Standard stage specifications based on the S160D Linear Shaft Motor

Note 2: Travel/Stroke with S160D coil; when using S160T, stroke is 30mm shorter; when using S160Q, stroke is 60mm shorter

Note 3: Repeatability +/- 2 counts sub 0.1μm resolutions

Note 4: For 10nm resolution, max velocity of encoder is limited to 135mm/sec; for 50nm, the limit is 675mm/sec; and for

100nm, the limit is 1350mm/sec

Note 5: Please contact our Applications Engineers for loads exceeding 45.5kg

The largest of the SCR stages, the SCR150 stage has stroke lengths up to 300mm while maintaining

the high performance and accuracy of the smaller SCR stages. Like the other three stages, the

SCR150 is a complete single axis stage which integrates a slide guide, encoder, and a Linear

Shaft Motor. It offers a wide range of advantages for applications requiring high performance

and accuracy.

Each SCR stage requires a servo driver to operate the stage. Any two SCR stages will

bolt directly together to form a very stiff, compact X-Y assembly, without the need for

adaptor plates. Two SCR stages can be supplied as an X-Y stage to insure true orthogonal

orientation between the two axes.

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

Pin

Signal

Function

2

0V

Ground

4

Z-

Reference Mark

5

B-

Incremental Signal

6

A-

Incremental Signal

7

5V

Power

8

5V

Power

9

0V

Ground

10

Q

Limit

11

P

Limit

12

Z+

Reference Mark

13

B+

Incremental Signal

14

A+

Incremental Signal

15

shield

Nippon Pulse

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