FS2012 Series Datasheet

© 2018 Integrated Device Technology, Inc.

8

August 24, 2018

10. Package Drawings and Land Pattern

The package outline drawings are appended at the end of this document and are accessible from the link below. The package information is

the most current data available.

https://www.idt.com/document/psc/fs2012-package-outline-drawing-5280-x-3317-mm-body-254-mm-pitch-mod0

11. Ordering Information

Note: The part code depends on the application. In the part code, NG refers to “non-corrosive gas” and LQ refers to “liquid.”



For NG parts, the calibration gas is nitrogen. Other calibration gases are available on request.



For LQ parts, the calibration fluid is DI water.

Orderable Part Number

Description and Package

Carrier Type

Temperature

FS2012-1020-NG

0 to 2 SLPM calibrated gas flow sensor mounted on a circuit

board with a flow housing; digital I2C and analog output

Box

0°C to +85°C

FS2012-1100-NG

0 to 10 SLPM calibrated gas flow sensor mounted on a circuit

board with a flow housing; digital I2C and analog output

Box

0°C to +85°C

FS2012-1001-LQ

0 to 0.5 SLPM (500 SCCM) calibrated liquid flow sensor mounted

on a circuit board with a flow housing; digital I2C and analog

output

Box

0°C to +85°C

FS2012-1002-LQ

0 to 1.0 SLPM (1000 SCCM) calibrated liquid flow sensor

mounted on a circuit board with a flow housing; digital I2C and

analog output

Box

0°C to +85°C