Silicon Microstructures, Inc. 2001-2017. All rights reserved

+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com

27

45

131

167

170

175

169

0

61

DOC # 40DS5960.05

SM5221, SM5321 & SM5421 Series

www.si-micro.com

Absolute Maximum Ratings

No.

Characteristic

Symbol

Minimum

Typical

Maximum

Units

1

Supply Voltage

2.7

6.00

V

2

Supply Current

4.00

mA

3

Update Period

2

mS

4

Compensated Temperature

-20

+85

°C

5

-40

+105

°C

6

-40

-

+125

°C

7

8

12

psi

9

15

psi

Notes:

a. Tested on a sample basis.

b. Clean, dry gas compatible with wetted materials. Wetted materials include silicon, epoxy, RTV, gold and aluminum.

c. Proof pressure is defined as the maximum pressure to which the device can be taken and still perform within specifications after

returning to the operating pressure range

d. Burst pressure is the pressure at which the device suffers catastrophic failure resulting in pressure loss through the device.

Page 2