100764006 datasheet(2/20 Pages) MKS

2 / 20 page

Series 76 ISO-Universal components are a vacuum

flanging system for 63 mm to 1000 mm fittings. The

dimension criteria are based on requirements established

by the International Standards Organization (ISO). There

are two flange styles in the ISO-Universal system: Multi-

Fastener (MF) and Bolted. The flange family is also

called: ISO-MF, ISO-PF or ISO-K. Figure 1 illustrates the

components of this flange system.

This catalog features a large variety of components such

as elbows, tees, crosses, reducers and adapters having

ISO-MF flanges. Currently there is no ISO standard for

the flange face to centerline distance in this system. There

is however, an industry standard followed by several

manufacturers. MKS Instruments follows these standards

in designing the Series 76 ISO-Universal components.

There are several advantages in the use of ISO

components. One advantage is that the flange is

“sexless.” The seal is on a symmetrical centering ring

that interfaces with two identical flanges. In addition, ISO-

Universal flanges are more compact than ASA flanges,

which were designed for pressure and are unnecessarily

massive for vacuum use. Since these flanges are an ISO

standard, they can be used with components from other

manufacturers.

Figure 1 —

Component Nomenclature for the ISO Universal Flange System

Applications

The Series 76 ISO-Universal component system is used

in a variety of industries from process manufacturing to

semiconductor fabrication to thin film deposition. Some

uses in vacuum systems are:

1. Roughing and foreline plumbing for large vacuum

systems

2. High vacuum, high conductance, interconnections

3. Modular systems which will be modified frequently

4. Experimental systems in research laboratories

ISO-Universal flange components using elastomer seals

are primarily designed for use at subatmospheric pressure.

When elastomer seals are used without baking, typical

limiting pressures may be around 10-6 Torr. Baked systems

using Viton can be used to 10-8 Torr.

Standard components can be used to a slight over

pressure. MF flanges may be used at a maximum pressure

of 30 psig if the metal spacer ring is used and the flange

clamps are firmly retained.

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