Specifications

Analyzer

Mass Range options

Vision 2000-C

1-300 amu

Vision 2000-E

1-200 amu

Ion Source

High conductance closed ion source

Filaments

Independently replaceable twin Tungsten filaments

Mass Filter

Double filter (1-inch “RF only” pre-filter with 4-inch main filter)

Detector System

Dual (Faraday and secondary electron multiplier)

Maximum Analyzer operating Pressure

1e-3 Torr at the ion source inlet (standard), higher pressure optional

Minimum Detectable Partial Pressure

<2e-11 Torr (for total pressures <1e-4 Torr on baseline inlet)

Minimum Detectable Concentration

<200 ppb of highest pressure gas for non-interfering species

Mass Stability

Better than ±0.1 amu over 8 hours

Resolution

Better than 10% valley between peaks of equal height throughout the mass range

Vacuum System Pressure Ranges

Base Pressure Ranges

Ion source at maximum pressure at 1 mTorr, 10 mTorr or 100 mTorr

Process Pressure Ranges

Ion source at maximum pressure at 10 mTorr, 100 mTorr, 500 mTorr, 1.5 Torr, 5 Torr,

10 Torr, 40 Torr, 100 Torr or 700 Torr (*optional gas acceleration for ranges <10 Torr

available. For other inlet and process pressure ranges, please consult the factory).

Mounting Flange

Vacuum Hardware

60 l/s turbomolecular pump with high conductance analyzer housing, inlet system,

Standard Backing Vacuum System

Connected to the tool foreline pump via Surge Protect assembly with a KF16 fitting

Optional Backing Vacuum System

Independent chemically resistant, dry diaphragm pump with KF16 fitting for connecting

the exhaust to a suitable scrubber system

Base Pressure

Better than 5e-9 Torr after bakeout

Bakeout Temperature & Bakeout Jacket

Included for 180°C bakeout

operating Temperature

90°C (controlled to ±1°C)

Total Weight

33 lbs. (15 kg) to bolt on Process System

Mechanical Support

optional stands and brackets are available

Mobile RGA Platform

optional RGA trolley to improve versatility (footprint 18x24”, 455x604mm)

Pneumatics

60-80 psig CDA

Control Unit/PC

Control Module Weight

1.7 kg

Power

88-264 VAC, 47/63 Hz, 600 Watts

Maximum operating Conditions

Electronics:

10-40°C, 80% RH (non-condensing)

LED Status Indication

Interlock status, filament emission, SEM, power and communications

I/o Capability

4 analog inputs and 2 outputs (plus 1 dedicated gauge input). optional support for a large

number of both analog and digital inputs and outputs, including relay control

other Facilities

Leak check headset socket, external filament trip socket, instrument reset

Software

Process Eye Professional fully network compatible control platform generating under 32bit

Communications

Ethernet CAT-5e

Minimum PC Specification Required

or AMD Athlon XP 1.2GHz, 1GB RAM, 120 GB hard drive, dependent

upon total number of sensors on the computer and the operating system in use.

Multi-sensor installation may require higher specifications.

Simultaneous Multi-Sensor

Process Eye Professional client/server configuration offers flexible multi-sensor operation.

Compliance

CE

RGA Controller to Vacuum System Cables

Length

33’ (10 m) standard RGA and 10’ (3m) with mobile RGA platform. other lengths available

dependent upon process system and customer requirements

Total Shipping Weight

44 lbs (20 Kg) may vary depending upon backing pump and instrument rack requirements