Applicable Wafer size

Circular wafer : 8, 12 inches diameter

X-axis

Stroke

550 mm

Positioning resolution 0.002 mm

Straightness

0.0015 mm/310 mm(both horizontal and vertical)

Y-axis

Stroke

427 mm

Positioning resolution 0.0002 mm(closed-loop control)

Positioning accuracy 0.002 mm/310 mm

Z-axis

Stroke

8.5 mm

Positioning resolution 0.0001 mm(closed-loop control)

Positioning accuracy 0.001 mm/1 mm

θ-axis Rotation range

380 deg (Max)

● Specifications

● Requirements

● External View

Power supply

Supply voltage :

Selected from 200/220/240/380/415

VAC ± 10% 3 phase, 50 to 60 Hz.

Power consumption

7kVA max

Compressed air

Pressure : 0.5 to 0.7 MPa

Pressure : 0.5 to 0.7 MPa

Cooling water for linear motor Pressure : 0.2 to 0.5 MPa (City water)

Dimentions

Weight

2,500 kg

TOKYO SEIMITSU

C-92-550-E-1812

Japan / Head Office

Tokyo Seimitsu Co., Ltd.

Tel:+81(0)42-642-0381

Fax:+81(0)42-631-5234

North America

Accretech America Inc.

(Head Office)

Tel: +1-214-459-1688

Fax: +1-214-459-1696

(Fremont Office)

Tel: +1-510-344-5411

Fax: +1-510-344-5410

(Boise Office)

Tel: +1-208-429-6500

Fax: +1-208-429-6555

Europe

Accretech (Europe) GmbH

(Head Office)

Tel: +49(0)89-546788-0

Fax: +49(0)89-546788-10

Korea

Accretech Korea Co., Ltd.

(Head Office / Seongnam)

Tel: +82(0)31-786-4000

Fax: +82(0)31-786-4090

Taiwan

Accretech Taiwan Co., Ltd.

Tel: +886(0)3-553-1300

Fax: +886(0)3-553-1319

Malaysia

Accretech (Malaysia) Sdn. Bhd.

(Head Office)

Tel: +60(3)5632-7488

Fax: +60(3)5632-7489

(Penang Office)

Tel: +60(4)6119-622

Singapore

Accretech (Singapore) Pte. Ltd.

Tel: +65-6341-6052

Fax: +65-6341-6054

Thailand

Accretech (Thailand) Co., Ltd.

(Semiconductor)

Tel: +66(2)024-8735-6

Fax: +66(2)024-8737

Accretech Adamas (Thailand) Co., Ltd.

Tel: +66(2)119-5489

Fax: +66(2)119-5488

Vietnam

Accretech Vietnam Co., Ltd.

(Head Office / Hanoi)

Tel: +84(24)3941-3309

Fax: +84(24)3941-3310

China

Accretech (China) Co., Ltd.

(Head Office / Shanghai)

Tel: +86(0)21-3887-0801

Fax: +86(0)21-3887-0805

(Shanghai Office)

Tel: +86(0)21-5064-0258

Fax: +86(0)21-5064-0356

(Beijing Office)

Tel: +86(0)10-8447-7010

Fax: +86(0)10-8447-7010

(Shenzhen Office)

Tel: +86(0)755-2515-9842

Fax: +86(0)755-2515-7737

(Chongqing Office)

Tel: +86(0)23-6295-5061

Fax: +86(0)23-6295-5060

(Chengdu Office)

Tel: +86(0)28-8738-2279

Fax: +86(0)28-8738-2279

(Suzhou Office)

Tel: +86(0)512-6265-6436

Fax: +86(0)512-6265-6435

(Wuxi Office)

Tel: +86(0)510-8101-7346

Fax: +86(0)510-8101-7346

(Xi’an Office)

Tel: +86(0)29-8886-3499

Fax: +86(0)29-8886-3499

http://www.accretech.jp/